Deaeration / Degas system

You can experience the power of deaeration, defoaming, and bubble removal immediately.

Deaeration system - Special site

Semiconductors
Electronic components
Food, Medical, Beauty

Oxygen and bubbles present in water and chemical solutions pose problems in various industries during the manufacturing and inspection processes of products. Tosetz’ Livalley, a deaeration system and equipment, eliminates the root causes of such bubbles.

Product Line-up

Tosetz' deaeration system controls dissolved gas components (nitrogen, oxygen, etc.) in liquids through vacuum and gas-liquid separation methods, improving our customer’s production processes. By installing our additional equipment on the utility supply line, we can achieve ultra-high-efficiency degassing in a single pass.

Stand-Alone type

LV-SCW25S, LV-SCW10S, LV-SCC10S

Basic Specification

■ Medium　　　：DIW, Chemical

■ Flow rate ：DIW (25L/min)

Chemical (10L/min)

■ Vacuum pump：Installed

■ Temperature ：Max.40℃*

■ Size 　　　　：450(W)x320(D)x1465(H)

*Can be discussed for requests except for standard line-up (Large flow rate, high temperature etc.)

*Can be added filter, dissolved oxygen meter etc. as options.

Compact type

LV-SCC5K

Basic Specification

■ Medium　　　：DIW, Chemical

■ Flow rate ：DIW (5L/min)

Chemical (5L/min)

■ Vacuum pump：Option

■ Temperature ：Max.40℃*

■ サイズ　　　　：180(W)x135(D)x306(H)

Bubble removal

Desmear, E-less/Electro Plating Process

Air bubbles trapped in deep bottomed via, trench and hydrophobic substrate surfaces can disturb the liquid contact. Pretreatment with deaeration water reduces this defect.

Reduce particles

Improvement cleaning performance

Cleaning Process

In ultrasonic cleaning, dissolved gas components can be removed from DIW, alkaline cleaning liquid, etc. It improves the ultrasonic efficiency and improves the cleaning performance.

Anti-corrosion effect

CMP, Plating

Deaeration water is effective for wet-handling after processing corrosive materials (e.g. Fe, Co, Fe) and for substrate keeping in water. It is also effective against galvanic corrosion on surface between dissimilar metals.

Life-time extension

of chemical

Plating, Resist strip Process

Removes dissolved oxygen from the chemical and prevents deterioration caused by oxidation. It can extend the life of the chemical. (e.g.) Au plating solution, magnetic material plating solution, amine-based photo resist, etc.

Bubble Removal

Oxidation Prevention

Life-time extension

Food, Medical, Cosmetics

Removing bubbles causing misidentification and noise in ultrasonic endoscopes and microscopes.
Removing bubbles causing misidentification during fluid visualization with high-sensitivity cameras.
Removing bubbles causing misidentification and noise in liquid particle counters.
Removing bubbles from highly viscous liquids like gelatin and collagen.
Preventing oxidation by replacing degassed water for cleaning water in beverage container cleaning processes.